Capacitive accelerometer

摘要

A capacitive accelerometer includes a substrate and a first semiconductor layer. The first semiconductor layer is disposed on the substrate and includes a first mass, first and second anchors, first and second elastic members, and first and second comb capacitor sets. The first and second anchors are disposed at positions corresponding to first and second axes respectively. The first elastic member is connected to the first mass and the first anchor in a manner of bending back and forth perpendicular to the first axis. The second elastic member is connected to the first mass and the second anchor in a manner of bending back and forth perpendicular to the second axis. The first and second comb capacitor sets are disposed at positions corresponding to the second and first axes respectively and connected to the first mass. The first axis is perpendicular to the second axis.

主权项

1. A capacitive accelerometer comprising:
a substrate; and a first semiconductor layer disposed on the substrate, the first semiconductor layer comprising:
a first mass;two first anchors located on at least one side of the first mass corresponding to a first axis;two first elastic members, each first elastic member being connected to the first mass and the corresponding first anchor in a manner of bending back and forth perpendicular to the first axis, for making the first mass move elastically along the first axis when a force is applied to the first mass in the first axis, and the bending times of the two first elastic members being different from each other;at least one first combo capacitor set connected to at least one side of the first mass corresponding to a second axis;at least one second anchor located on at least one side of the first mass corresponding to the second axis;a second elastic member connected to the first mass and the second anchor in a manner of bending back and forth perpendicular to the second axis, for making the first mass move elastically along the second axis when a force is applied to the first mass in the second axis; andat least one second combo capacitor set connected to at least one side of the first mass corresponding to the first axis; wherein the first axis is perpendicular to the second axis.