APARELHO E MÉTODO PARA O TRATAMENTO QUÍMICO A ÚMIDO DE UM PRODUTO E MÉTODO PARA INSTALAR UM MEMBRO DE FLUXO NO APARELHO.

摘要

To ensure a uniform flow over the surface of a product W, an apparatus is provided for the wet chemical treatment of the product W that is disposed in the apparatus 100. This apparatus comprises at least one flow member 150 that includes respectively at least one paddle-like flow element 155, wherein at least one flow member 155 is disposed situated opposite the surface of the product W and is moveable substantially parallel to the surface of the product W.