Ion chamber based neutron detectors

摘要

A neutron detector with monolithically integrated readout circuitry, including: a bonded semiconductor die; an ion chamber formed in the bonded semiconductor die; a first electrode and a second electrode formed in the ion chamber; a neutron absorbing material filling the ion chamber; and the readout circuitry which is electrically coupled to the first and second electrodes. The bonded semiconductor die includes an etched semiconductor substrate bonded to an active semiconductor substrate. The readout circuitry is formed in a portion of the active semiconductor substrate. The ion chamber has a substantially planar first surface on which the first electrode is formed and a substantially planar second surface, parallel to the first surface, on which the second electrode is formed. The distance between the first electrode and the second electrode may be equal to or less than the 50% attenuation length for neutrons in the neutron absorbing material filling the ion chamber.

主权项

1. A system, comprising:
a thermal neutron detector; a high pressure ion chamber formed in a dielectric material, the high pressure ion chamber having a substantially planar first surface and a substantially planar second surface parallel to the first surface; a first electrode formed on the first surface of the high pressure ion chamber; a second electrode formed on the second surface of the high pressure ion chamber, wherein electronics are embedded within a device layer of a wafer; a neutron absorbing material filling the high pressure ion chamber, a chamber pressure of the neutron absorbing material being equal to or greater than 100 atm, wherein the high pressure ion chamber increases utilization of the neutron absorbing material due to reduced self-absorption and uniform distribution of absorbing material as enabled by the substantially planar first surface and the substantially planar second surface parallel to the first surface; and a neutron moderating material encompassed by the thermal neutron detector.