发明名称 Spiral design graphene nanoribbon
摘要 Graphene nanoribbons and methods for fabricating graphene nanoribbons, particularly those with long lengths, are provided. In one embodiment, a method (400) for fabricating a graphene nanoribbon (100) includes preparing (410) a mask for application on a substrate (102). The mask may include a continuous line of masking material spiraling outward from a first end (104) of the line to a second end (106). The method (400) also includes depositing (420) a graphene layer (108) over a top surface (102A) of the substrate (102), applying (430) the mask to the substrate (102) over the graphene layer (108), removing (440) an unmasked portion of the graphene layer (108), and removing (450) the masking material from a remaining portion of the graphene layer (108) to leave a continuous line of graphene on the surface (102A) of the substrate (100) corresponding with the mask.
申请公布号 US8911931(B2) 申请公布日期 2014.12.16
申请号 US201313944703 申请日期 2013.07.17
申请人 Lockheed Martin Corporation 发明人 Schwartz Rebecca;Garga Amulya
分类号 G03F7/26;C01B31/04 主分类号 G03F7/26
代理机构 Marsh Fischmann & Breyfogle LLP 代理人 Marsh Fischmann & Breyfogle LLP
主权项 1. A method for fabricating a graphene nanoribbon, said method comprising the steps of: preparing a mask for application on a substrate, the mask including a continuous line of masking material spiraling outward from a first end of the line to a second end of the line; depositing a graphene layer over a surface of the substrate; applying the mask to the substrate over the graphene layer to achieve a masked portion of the graphene layer; first removing an unmasked portion of the graphene layer from the surface of the substrate; and second removing the masking material from a remaining portion of the graphene layer to leave a continuous spiral line of graphene on the surface of the substrate corresponding with the mask.
地址 Bethesda MD US
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