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发明名称
电浆处理装置的控制方法
摘要
本发明的课题是在于提供一种即使在多段步骤蚀刻中还是可维持低污染,高均一,不需要事前的共振点调查之电浆处理装置的控制方法。一种具备调整往对向天线电极流动的高频偏压电流的工程之电浆处理装置的控制方法,其系包含:将可变元件的电抗设定成初期值之工程(S2);检测往对向天线电极流动的偏压电流之工程(S4);寻找检测后的电流的极大值之工程(S5,S6);将可变元件的电抗值从极大值移动至所被设定的值之后,固定之工程(S7,S8)。
申请公布号
TW201447961
申请公布日期
2014.12.16
申请号
TW103100647
申请日期
2014.01.08
申请人
日立全球先端科技股份有限公司
发明人
森政士;平田昭;山本浩一;荒瀬高男
分类号
H01J37/32(2006.01)
主分类号
H01J37/32(2006.01)
代理机构
代理人
<name>林志刚</name>
主权项
地址
日本
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