TERAHERTZ WAVE DETECTING DEVICE, CAMERA, IMAGING APPARATUS AND MEASURING APPARATUS

摘要

Provided is a device to detect terahertz waves capable of converting to electric signals at high preciseness even when detecting terahertz. The device includes: a base substrate (2); and a plurality of first detection component (9) which are arranged on the base substrate (2). The first detection component (9) includes: a first metal layer (21) which is mounted on the base substrate (2); a support substrate (26) which is installed at a distance from the first metal layer (21); a dielectric layer (31) which is installed on the support substrate (26) and generates heat by absorbing terahertz waves; and a conversion unit (35) in which a second metal layer (32), a superconducting layer (33), and a third metal layer (34) are stacked and installed on the dielectric layer (31) and converts the heat generated in the dielectric layer (31) into electric signals.