发明名称 TFT structure and LCD device
摘要 A thin film transistor (TFT) structure includes a first metal layer. The first metal layer is configured with an insulating layer, a second metal layer covers a surface of the insulating layer, an area of the second metal layer that corresponds to an area above the first metal layer is configured with a gap. An area of the insulating layer that corresponds to the gap is configured with a groove. An active layer made of an indium gallium zinc oxide (IGZO) covers surfaces of the second metal layer, the gap, and the groove.
申请公布号 US8912542(B2) 申请公布日期 2014.12.16
申请号 US201313824341 申请日期 2013.02.27
申请人 发明人 Tseng Chihyuan
分类号 H01L29/78;G02F1/1368;H01L29/66;H01L29/786 主分类号 H01L29/78
代理机构 代理人
主权项 1. A thin film transistor (TFT) structure, comprising: a first metal layer; wherein the first metal layer is configured with an insulating layer, a second metal layer covers a surface of the insulating layer; an area of the second metal layer that corresponds to an area above the first metal layer is configured with a gap; wherein an area of the insulating layer that corresponds to the gap is configured with a groove; wherein an active layer made of an indium gallium zinc oxide (IGZO) covers surfaces of the second metal layer, the gap, and the groove.
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