| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric thin film made of scandium aluminum nitride, which is capable of reliably exhibiting excellent piezoelectric characteristics, and a method for producing the piezoelectric thin film.SOLUTION: A piezoelectric thin film 1 is obtained by sputtering and made of scandium aluminum nitride, and has a percentage content of carbon atoms of 2.5 at% or less. In producing the piezoelectric thin film 1, scandium and aluminum are simultaneously sputtered on a substrate from a scandium aluminum alloy target material having a percentage content of carbon atoms of 5 at% or less, in an atmosphere containing at least nitrogen gas. Or, sputtering may be also performed by obliquely irradiating a surface facing the alloy target material with ion beams. Alternatively, scandium and aluminum may be also simultaneously sputtered on a substrate from an Sc target material and an Al target material.</p> |
