METAL NITRIDE MATERIAL FOR THERMISTOR, METHOD FOR MANUFACTURING THE SAME, AND FILM-TYPE THERMISTOR SENSOR

摘要

PROBLEM TO BE SOLVED: To provide: a highly reliable metal nitride material for a thermistor which can be shaped into a film or the like directly without a calcination process and has high heat resistance; a method for manufacturing the metal nitride material for a thermistor; and a film-type thermistor sensor.SOLUTION: A metal nitride material is used for a thermistor. The metal nitride material comprises a metal nitride expressed by the following general formula: VAlN(where 0.70≤y/(x+y)≤0.98; 0.4≤z≤0.5; and x+y+z=1), the crystal structure of which is a hexagonal wurtzite type single phase. A method for manufacturing the metal nitride material for a thermistor comprises a film formation step in which a film is formed by performing a reactive sputtering with a V-Al alloy sputtering target in an atmosphere containing nitrogen.