MANUFACTURING METHOD OF POLISHING HEAD AND POLISHING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a polishing head capable of polishing a work of high flatness.SOLUTION: A polishing head 2 is provided with a packing pad 12 installed in a lower part of a rigid body 6 and holding a reverse surface of a work W and a ring-like template 13 for holding an edge part of the work W on an under surface of the packing pad 12, and polishes a surface of the work W by slidably contacting with polishing cloth 4 stuck on a surface plate 3 while holding the reverse surface of the work W by the under surface of the packing pad 12. The manufacturing method of the polishing head 2 comprises a packing pad adhesion process of adhering by a double-sided adhesive tape 16 to a lower part of the rigid body 6 under pressure reduction without heating the packing pad 12 and a template adhesion process of adhering to the packing pad 12 by the double-sided adhesive tape or a reaction-curable solventless liquid or pasty adhesive 21 under pressure reduction without heating the template 13 after the packing pad adhesion process.