| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a conveyance head which conveys end materials generated when a substrate having functional regions arranged and formed in the longitudinal direction and the lateral direction is broken, and which is easily removed.SOLUTION: A conveyance head includes a base plate 21 and a lid plate 22, and a void 24 is provided therebetween to be connected to each other. In the void 24, a pusher plate 31 having an annual pusher pin 32 is housed vertically movably. Then, when sucking end materials, air is sucked from openings to attract the end materials and convey them to a predetermined place in a state where the pusher pins 32 are housed. Also, when removing the end materials, the air is jetted from the openings, and at the same time, the pusher pins 32 are made to protrude from the openings. As a result, all end materials can be removed.</p> |
