| 摘要 |
PROBLEM TO BE SOLVED: To provide a load port apparatus capable of smoothly opening/closing a cover of a hoop and suppressing generation of particles by a simple structure.SOLUTION: A load port apparatus 1 for opening/closing an aperture 93 of a hoop 9 by moving a cover 92 of the hoop 9 includes: cover holding means 3 in which an upper side roller 34 and a lower side roller 35 are arranged on mutually separated positions so as to hold the cover 92 each other; a groove-like rail 4 laid on an apparatus body 2 to guide the upper side roller 34 and the lower side roller 35; and driving means 5 for applying driving force to the lower side roller 35 in a Z direction for guiding the lower side roller 35. When the driving force is applied to the lower side roller 35 by the driving means 5, the driving force is propagated to the upper side roller 34, and while guiding both the upper side roller 34 and the lower side roller 35 by the groove-like rail 4, the cover holding means 3 is moved to move the cover 92 between a position for opening the aperture 93 of the hoop 9 and a position for closing the aperture 93. |
