发明名称 A METHOD FOR DOUBLE SIDE COATING OF TRANSPARENT CONDUCTIVE OXIDE ON A FLEXIBLE SUBSTRATE
摘要 <p>The present invention provides a method for coating both sides of a transparent conductive film of a flexible substrate, comprising: a step (a) of preparing a coating chamber formed to allow a flexible substrate to enter one side and to come out of the other side after a coating process; a step (b) of transferring the flexible substrate to the inside of the coating chamber, and exposing upper and lower sides of the flexible substrate to a space; a step (c) of fixing the flexible substrate, and fixing front and rear edges of the flexible substrate based on a processing direction; and a step (d) of depositing a transparent conductive film precursor on the flexible substrate by flowing the transparent conductive film precursor in a direction perpendicular to a processing direction while being in parallel with the upper and lower sides of the flexible substrate.</p>
申请公布号 KR101472377(B1) 申请公布日期 2014.12.15
申请号 KR20130112688 申请日期 2013.09.23
申请人 KOREA INSTITUTE OF CERAMIC ENGINEERING AND TECHNOLOGY;SOLARCERAMIC CO., LTD. 发明人 HUH, SEUNG HUN;SONG, CHUL KYU;KIM, DA HAE;RIU, DOH HYUNG;PARK, SUNG HWAN;KIM, BO MIN;KIM, BYUNG JONG
分类号 C23C26/00;C23C16/44;H01L21/205 主分类号 C23C26/00
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