NANO STRUCTURED COMPOSITE THIN FILM, METHODS FOR FORMING THE SAME, MEMBERS WITH LOW FRICTION AND METHOD FOR FORMING THE SAME

摘要

The purpose of the present invention is to provide a nano-structured composite thin film having remarkably improved friction properties, high hardness, and hard adhesion, a manufacturing method thereof, a low-friction member, and a manufacturing method thereof. According to an aspect of the present invention, the size of the crystal grain of the nano-structured composite thin film having low-friction properties is in a range of 5nm to 30nm by using a sputtering target composed of one or more of a nitride phase including Zr and Al as nitride constituents, Cu, and Ni, one or more of P and S, and the remainder consisting of Zr.