发明名称 IMAGE ACQUISITION DEVICE AND IMAGE ACQUISITION SYSTEM
摘要 <p>PROBLEM TO BE SOLVED: To provide an image acquisition device that can obtain excellent image data on an entire specimen even when unevenness in a depth direction is present on a surface of the specimen.SOLUTION: An image acquisition device 2000 comprises: an image formation optical system 20 that forms an image of an object 110; a re-image formation optical system 40 that re-forms the image of the object 110 formed by the image formation optical system 20; reflection means 30 that is arranged on an optical path between the image formation optical system 20 and the re-image formation optical system 40; an image pickup element 50 that images the object 110 via the re-image formation optical system 40; and at least one of a first drive part that drives the reflection means 30 and a second drive part that drives the image pickup element 50. The image acquisition device 2000 has a computation part 400 that controls at least one of the first drive part and the second drive part on the basis of a longitudinal magnificationξMof the image formation optical system 20 corrected by a correction coefficientξ, and a shape of the object 110.</p>
申请公布号 JP2014235254(A) 申请公布日期 2014.12.15
申请号 JP20130115681 申请日期 2013.05.31
申请人 CANON INC 发明人 TANAKA KAZUMASA
分类号 G02B21/36 主分类号 G02B21/36
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