发明名称 |
TERAHERTZ WAVE DETECTING APPARATUS, CAMERA, IMAGING APPARATUS, AND MEASURING APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a terahertz wave detecting apparatus that can accurately convert a terahertz wave into electric signals.SOLUTION: A terahertz wave detecting apparatus comprises a base plate 2 and a plurality of first detection elements 9 arrayed above the base plate 2. Each of the first detection elements 9 has an absorber 42 that absorbs a terahertz wave 15 to generate heat and a converter 34 that converts the heat generated by the absorber 42 into electric signals. The absorber 42 has a dielectric layer 40, a first metal layer 41 disposed on one face of the dielectric layer 40 and a second metal layer 33 disposed on the other face of the dielectric layer 40, and the plurality of first detection elements 9 are so arrayed that the terahertz wave 15 diffracted between adjoining absorbers 42 is brought to incidence on the dielectric layer 40.</p> |
申请公布号 |
JP2014235146(A) |
申请公布日期 |
2014.12.15 |
申请号 |
JP20130118565 |
申请日期 |
2013.06.05 |
申请人 |
SEIKO EPSON CORP |
发明人 |
TOMIOKA HIROTO |
分类号 |
G01J1/02;G01N21/3581;H01L27/144;H01L37/02;H04N5/225;H04N5/369 |
主分类号 |
G01J1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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