发明名称 TERAHERTZ WAVE DETECTING APPARATUS, CAMERA, IMAGING APPARATUS, AND MEASURING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a terahertz wave detecting apparatus that can accurately convert a terahertz wave into electric signals.SOLUTION: A terahertz wave detecting apparatus comprises a base plate 2 and a plurality of first detection elements 9 arrayed above the base plate 2. Each of the first detection elements 9 has an absorber 42 that absorbs a terahertz wave 15 to generate heat and a converter 34 that converts the heat generated by the absorber 42 into electric signals. The absorber 42 has a dielectric layer 40, a first metal layer 41 disposed on one face of the dielectric layer 40 and a second metal layer 33 disposed on the other face of the dielectric layer 40, and the plurality of first detection elements 9 are so arrayed that the terahertz wave 15 diffracted between adjoining absorbers 42 is brought to incidence on the dielectric layer 40.</p>
申请公布号 JP2014235146(A) 申请公布日期 2014.12.15
申请号 JP20130118565 申请日期 2013.06.05
申请人 SEIKO EPSON CORP 发明人 TOMIOKA HIROTO
分类号 G01J1/02;G01N21/3581;H01L27/144;H01L37/02;H04N5/225;H04N5/369 主分类号 G01J1/02
代理机构 代理人
主权项
地址