ROTATING BODY CONTROL DEVICE AND LASER PROCESSING APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a rotating body control device and a laser processing apparatus in which vibration can be suppressed even if shortening a command interval.SOLUTION: A rotating body control device includes: a generation vibration frequency estimation unit for estimating the vibration frequency generated from the time before this angle command signal is issued from the last angle command signal and the moving direction of the last time and this time; a vibration amplitude identification unit for identifying a vibration amplitude (gain) based on a tracking error; a vibration suppression signal creation unit for creating a vibration suppression signal to be added to a torque command signal; an angle variation amount calculation unit for calculating an angle variation amount becoming an excess or deficiency when the vibration suppression signal is added to the torque command signal; an angle command magnification change unit for changing a scaling factor of the angle command; and a memory unit in which the vibration frequency estimated in the generation vibration frequency estimation unit, the vibration amplitude (gain) identified in the vibration amplitude identification unit and the angle variation amount calculated in the angle variation amount calculation unit are associated and stored.