发明名称 SINGLE CRYSTAL GROWTH APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a crystal growth apparatus capable of equalizing a circumferential directional intensity distribution of each laser light beam without requiring a plurality of laser light sources.SOLUTION: There is provided a single crystal growth apparatus that grows a single crystal by irradiating a heated part of a columnar sample S with heating laser light L from a direction orthogonal to the sample when viewed from an axial direction of the sample S. A plurality of laser light sources which emit the heating laser light L are arranged along a circumferential direction of the sample. The laser light L that the sample S is irradiated with from each laser light source has a predetermined width W. The single crystal growth apparatus is provided with intensity adjustment means of making the laser intensity of the laser light L higher on an irradiation width-directional end side than at an irradiation width-directional center part.</p>
申请公布号 JP2014231459(A) 申请公布日期 2014.12.11
申请号 JP20130113115 申请日期 2013.05.29
申请人 CANON MACHINERY INC 发明人 NOGUCHI SHUNJI
分类号 C30B13/24 主分类号 C30B13/24
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