| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a biaxial rotary pump which prevents reverse flow of exhaust gas into the inside of a pump as low as possible and prevents the inside of the pump from coming into excessive compression as low as possible, and thereby suppresses temperature rise in the pump to improve reliability and operation efficiency.SOLUTION: In a biaxial rotary pump, two rotation shafts 20, 20 include two rotors 30, 30 such that the two rotors 30, 30 are rotated in a non-contact manner with a minimal clearance therebetween and in non-contact with the inner face of a cylinder 50 with a minimal clearance between the rotors 30, 30 and the cylinder 50. The rotation shafts 20, 20 are provided by support by bearings. The biaxial rotary pump suctions gas into the cylinder 50 and exhausts compressed gas from the cylinder 50. At least one of end wall parts 52 constituting both ends of the cylinder 50 includes a relief port capable of relieving a part of the compressed gas is opened to face in the axial direction of the rotation shafts 20, 20.</p> |
