发明名称 System, Method and Apparatus For Polarization Control
摘要 A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complimentary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.
申请公布号 US2014361152(A1) 申请公布日期 2014.12.11
申请号 US201414296425 申请日期 2014.06.04
申请人 KLA-Tencor Corporation 发明人 Maleev Ivan;Pettibone Donald
分类号 G01N21/21;G01N21/01;G02B27/28;G02B5/30;G02B1/02 主分类号 G01N21/21
代理机构 代理人
主权项 1. A polarization control apparatus comprising: a first wave plate having a first surface profile; and a second wave plate having a second surface profile complimentary to the first surface profile; the optical axis of the first wave plate substantially orthogonal to the optical axis of the second wave plate; the first wave plate and the second wave plate positioned so as to substantially align the first surface profile with the second surface profile and maintain a constant thickness of an assembly of the first wave plate and second wave plate, the first wave plate and the second wave plate being configured to control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system, the first profile of the first wave plate being separated from the second profile of the second wave plate by a selected distance so as to limit wave front distortion of illumination passing through the first wave plate and second wave plate below a selected level.
地址 Milpitas CA US