PLANAR MOTOR AND PROCESSING APPARATUS USING THE SAME

摘要

A planar motor of the present invention includes a base unit which one or more stators are arranged; a mover which moves along a magnetic field generated by the stators; a mover supporter which is coupled to the mover, supports the mover against the planar object, and moves the mover by the force of the magnetic field; and a control unit which supplies a control current for the mover and controls the location of the mover.