| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a technology capable of suppressing vibration generated on a vibration removal target even when the vibration removal target itself is operated.SOLUTION: An inspection device 1 comprises an inspection part including: movement means for moving an inspection target to an imaging position; and imaging means 20 for imaging the inspection target at the imaging position, and the inspection part captures an image for inspecting the inspection target. When a vibration removal part supports the inspection part, and the movement means moves the inspection target, the inspection part is fixed with respect to an installation position of the inspection device 1, and when the imaging means 20 images the inspection target, fixing of the inspection part with respect to the installation position is released.</p> |
