发明名称 COMPOUND SLOT
摘要 The present disclosure describes a compound slot, and systems and methods of forming the compound slot. An example of a compound slot includes a wafer, where the compound slot includes a trench along a long axis of the compound slot and on a top surface of the wafer, where the trench passes through an initial portion of a total depth of the wafer. A number of openings pass through a remaining portion of the total depth of the wafer, where at least a retained portion of a bottom of the trench is present around a perimeter of each of the number of openings.
申请公布号 US2014362146(A1) 申请公布日期 2014.12.11
申请号 US201214376058 申请日期 2012.04.27
申请人 Ge Ning;Peh Bee Ling;Benjamin Trudy;Ng Ken Kiat;Gu Jianhui 发明人 Ge Ning;Peh Bee Ling;Benjamin Trudy;Ng Ken Kiat;Gu Jianhui
分类号 B41J2/175;B23K26/38;B41J2/16 主分类号 B41J2/175
代理机构 代理人
主权项 1. A compound slot, comprising: a wafer, wherein the compound slot comprises: a trench along a long axis of the compound slot and on a top surface of the wafer, wherein the trench passes through an initial portion of a total depth of the wafer; anda number of openings that pass through a remaining portion of the total depth of the wafer, wherein at least a retained portion of a bottom of the trench is present around a perimeter of each of the number of openings.
地址 Singapore SG