发明名称 HYDROPHOBIC ENCAPSULATION MATERIAL WITH ALTERNATING LAYERS
摘要 An encapsulation material is described that prevents moisture or oily substances from penetrating into a protected region or device. The encapsulation material includes alternating layers of a hydrophobic and oleophobic first layer and a hydrophilic second layer. The second hydrophilic layer traps water molecules, preventing them from migrating. By alternating hydrophobic/oleophobic layers with hydrophilic layers (including hydrophobic layers having a thickness of approximately that of a water molecule or a hydroxyl ion), the encapsulation material forms multiple, finite energic wells at the hydrophilic layers. These potential wells confine water molecules, oxygen molecules, and hydroxyl ions preventing migration of through the encapsulation material.
申请公布号 WO2014081638(A9) 申请公布日期 2014.12.11
申请号 WO2013US70397 申请日期 2013.11.15
申请人 VEECO ALD INC. 发明人 LEE, SANG, IN
分类号 C23C16/00;H01L21/302;H05H1/00 主分类号 C23C16/00
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