发明名称 Integrated Metal Grating
摘要 An integrated circuit includes a substrate, a metal grating disposed over the substrate, and a waveguide layer disposed over or under the metal grating. The metal grating is arranged to change a propagation direction of an optical signal and the waveguide layer is arranged to guide the optical signal to a desired direction.
申请公布号 US2014363121(A1) 申请公布日期 2014.12.11
申请号 US201313915300 申请日期 2013.06.11
申请人 Taiwan Semiconductor Manufacturing Company, Ltd. 发明人 Lai Jui Hsieh;Bao Tien-I;Chen Hai-Ching;Kuo Ying-Hao
分类号 G02B6/12 主分类号 G02B6/12
代理机构 代理人
主权项 1. An integrated circuit, comprising: a substrate; a metal grating disposed over the substrate; and a waveguide layer disposed over or under the metal grating, wherein the metal grating is arranged to change a propagation direction of an optical signal and the waveguide layer is arranged to guide the optical signal to a desired direction.
地址 Hsin-Chu TW