| 发明名称 |
Method and Device for Replacing Objective Parts |
| 摘要 |
A method and a device for replacing objective parts, especially of a projection or illumination objective for microlithography in which an objective having an objective interior and objective parts provided therein is provided. At least one objective part is replaceably accommodated in the objective. Immediately prior to installation in the objective, the replaceable objective part is cleaned outside the objective interior in at least one cleaning room sealed off from the ambient atmosphere. Immediately after cleaning, the replaceable objective is installed in the objective without contact with the normal ambient atmosphere. |
| 申请公布号 |
US2014359990(A1) |
申请公布日期 |
2014.12.11 |
| 申请号 |
US201414467609 |
申请日期 |
2014.08.25 |
| 申请人 |
Carl Zeiss SMT GMBH |
发明人 |
Geuppert Bernhard;Limbach Guido;Woelfle Harald;Deufel Peter |
| 分类号 |
G03F7/20;B08B3/12;B08B7/00;B23P6/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. Method for replacing objective parts comprising:
providing an objective having an objective interior and objective parts provided therein, at least one objective part being replaceably accommodated in the objective, cleaning the replaceable objective part outside the objective interior in at least one cleaning room sealed off from the ambient atmosphere and, immediately after the cleaning, installing the replaceable objective part in the objective without contact with the ambient atmosphere. |
| 地址 |
Oberkochen DE |
