| 摘要 |
Provided is a measurement device including a light source that sequentially emits plural beams of light which are respectively incident on an object and of which optical axes are parallel or substantially parallel to each other, a condensing optical system that condenses the plural beams of light reflected from the object or the plural beams of light transmitted through the object, a light receiving unit, a light receiving surface of which is placed on a back focal plane of the condensing optical system, and that outputs a distribution or a center position of an intensity of light received in the light receiving surface, and a measurement unit that measures at least one of an angle and an angle distribution of a surface of the object, based on an output value output from the light receiving unit for each light applied to the object from the light source. |
