发明名称 RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION
摘要 An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol% to about 99 mol%, ZrO2 in a range between about 0 mol% to about 55 mol%, and Al2O3 in a range between about 0 mol% to about 10 mol%. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol% to about 60 mol%, ZrO2 in a range between about 0 mol% to about 20 mol%, and Al2O3 in a range between about 30 mol% to about 60 mol%.
申请公布号 WO2014197203(A1) 申请公布日期 2014.12.11
申请号 WO2014US38858 申请日期 2014.05.20
申请人 APPLIED MATERIALS, INC. 发明人 SUN, JENNIFER Y.;KANUNGO, BIRAJA P.;CHO, TOM
分类号 H01L21/56 主分类号 H01L21/56
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