| 摘要 |
PROBLEM TO BE SOLVED: To provide a chip spacing preserving device capable of appropriately preserving spacing between chips.SOLUTION: A chip spacing preserving device (2) preserves spacing of a plurality of chips (27) resulting from dividing a workpiece (11). The device comprises: a table (4) including a support surface (8a) for supporting the workpiece mounted on an annular frame (25) via an expandable sheet (23) and heating means (16) for heating the support surface, and for chucking and holding the workpiece via the expandable sheet; fixing means (40) for fixing the annular frame on the outer circumference of the table; expansion means (4, 18, 24, 26) for expanding the expandable sheet; far infrared ray irradiation means (42) for irradiating far infrared ray (48) toward the expandable sheet which is expanded between an outer edge of the workpiece and the inner circumference of the annular frame; and positioning means for positioning the far infrared ray irradiation means at an irradiation position and a retracted position. |
