| 发明名称 |
INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM |
| 摘要 |
An information calculation method includes: calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region, in which the liquid information satisfies predetermined conditions, on the object. |
| 申请公布号 |
US2014362354(A1) |
申请公布日期 |
2014.12.11 |
| 申请号 |
US201414297988 |
申请日期 |
2014.06.06 |
| 申请人 |
NIKON CORPORATION |
发明人 |
NISHINO Mineyuki;NAKANO Katsushi;TAKAHASHI Satoshi |
| 分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An information calculation method, comprising:
calculating liquid information regarding a liquid on an object, which faces an optical member that emits exposure light, when moving the object; and calculating region information indicating a region on the object, the liquid information satisfying predetermined condition in the region. |
| 地址 |
Tokyo JP |
