DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To properly inspect defects of respective organic layers formed to be laminated on a substrate in an organic light-emitting diode.SOLUTION: A defect inspection device 165 includes: a lighting unit 220 for irradiating an organic layer on a glass substrate G with near-infrared light having a wavelength of 0.7-2.5 μm; an imaging unit 230 for imaging the organic layer irradiated with the near-infrared light from the lighting unit 220; and a processing container 200 for housing the lighting unit 220 and the imaging unit 230 therein and inspecting the organic layer. The inside of the processing container 200 is maintained in an atmosphere having a lower oxygen concentration and a lower dew-point temperature than the atmospheric air.