| 摘要 |
This inspection apparatus (100, 200) is provided with: three-dimensional measuring units (42, 43) that are capable of acquiring height information of an area to be inspected (120, 220); a two-dimensional measuring units (41, 43) that are capable of acquiring at least one kind of information among hue information, chroma information, and brightness information; and a control unit (51), which performs three-dimensional measurement, and corrects, on the basis of results of the three-dimensional measurement, an inspection region (140, 240) where the area to be inspected is to be inspected, and performs two-dimensional measurement in the corrected inspection region. |
