发明名称 |
METHOD OF MANUFACTURING THE MULTI LAYER THIN FILM, THE MEMBER INCLUDING THE SAME, AND THE ELECTRONIC PRODUCT INCLUDING THE SAME |
摘要 |
The present invention relates to a method for manufacturing a multilayered thin film using an apparatus to deposit a multilayered thin film to form a multilayered thin film by depositing a target particle, which is separated from a target due to plasma discharge, on a metal object; and a multilayered thin film. More specifically, the present invention relates to a sputtering deposition apparatus as an embodiment of the apparatus to deposit a multilayered thin film. According to an embodiment of the present invention, the method for manufacturing a multilayered thin film comprises: a step of coating a metal object with a coating layer; a step of depositing at least one hardness reinforcement layer on the coating layer; and a step of depositing a color layer on the hardness reinforcement layer. |
申请公布号 |
KR20140142122(A) |
申请公布日期 |
2014.12.11 |
申请号 |
KR20130131649 |
申请日期 |
2013.10.31 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM, JIN SUB;YOO, HYONG JUN;JUNG, MIN CHUL;JUNG, HYUN JUN;CHO, JIN HYUN |
分类号 |
C23C28/00;B32B15/08;C23C14/34 |
主分类号 |
C23C28/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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