摘要 |
PROBLEM TO BE SOLVED: To allow use of an electrode cheaper than Au.SOLUTION: A semiconductor device comprises: a first titanium layer which is a layer formed to cover at least a part of a semiconductor layer and formed by titanium; an aluminum layer which is a layer formed on the opposite side to the semiconductor layer across the first titanium layer and consists primarily of aluminum; a titanium nitride layer which is a layer formed on the opposite side to the first titanium layer across the aluminum layer and formed by titanium nitride; and an electrode layer which is a layer formed on the opposite side to the aluminum layer across the titanium nitride layer and formed by silver. |