| 摘要 |
A sintered sputtering target containing a Fe-Pt alloy and a non-magnetic material as the main components, said sintered sputtering target being characterized in that at least C (carbon) is contained as the non-magnetic material, an additional trace element other than the above-mentioned main components is contained in an amount of 50 to 5000 ppm by mass, and the standard free energy of formation (&Dgr;G°) of the additional trace element per 1 mole of carbon in a carbide is -5000 [cal/mol] or less. The present invention addresses the problem of providing a sputtering target which undergoes the formation of particles in a greatly reduced amount upon sputtering and contains a Fe-Pt alloy and a non-magnetic material as the main components. |
