| 发明名称 |
SENSOR FOR MEASURING SURFACE NON-UNIFORMITY |
| 摘要 |
A method includes forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging lens on a sensor; and comparing an image of the sample array of focus spots to a reference array of focus spots to determine a level of non-uniformity in the sample region. |
| 申请公布号 |
US2014362371(A1) |
申请公布日期 |
2014.12.11 |
| 申请号 |
US201214366399 |
申请日期 |
2012.12.11 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
Qiao Yi;Lai Jack W.;Ribnick Evan J.;Hofeldt David L. |
| 分类号 |
G01B11/30;G01N21/95 |
主分类号 |
G01B11/30 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method, comprising:
forming a two-dimensional interrogating beam on a selected sample region of a surface; collecting light transmitted through or reflected from the sample region with an array of lenses to form a sample array of focus spots; imaging the sample array of focus spots through an imaging lens on a sensor; and comparing an image of the sample array of focus spots to a reference array of focus spots to determine a level of non-uniformity in the sample region, optionally wherein the light source comprises a laser. |
| 地址 |
St. Paul MN US |
