| 摘要 |
<p>PROBLEM TO BE SOLVED: To surely and accurately cool a heating medium liquid supplied to a supply object to a desired temperature while reducing the manufacturing cost.SOLUTION: A control section 9 repeatedly performs first processing for controlling a three-way valve 7a in accordance with an operation signal instructing processing start or a sensor signal S6a to communicate piping P1a and piping P1c with each other and controlling a three-way valve 7b to communicate piping P3c and piping P3a with each other, second processing for controlling the three-way valve 7a in accordance with a measurement start signal S1 to communicate the piping P1a and the piping P1c with each other and controlling the three-way valve 7b to communicate the piping P3c and piping P3b with each other, a third processing for controlling the three-way valve 7a in accordance with a sensor signal S6b to communicate piping P1b and the piping P1c with each other and controlling the three-way valve 7b to communicate the piping P3c and the piping P3b with each other, and fourth processing for controlling the three-way valve 7a in accordance with the signal S1 to communicate the piping P1b and the piping P1c with each other and controlling the three-way valve 7b to communicate the piping P3c and the piping P3a with each other, in this order.</p> |
