| 发明名称 |
RARE-EARTH OXIDE BASED EROSION RESISTANT COATINGS FOR SEMICONDUCTOR APPLICATION |
| 摘要 |
An article includes a body that is coated with a ceramic coating. The ceramic coating may include Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range between about 0 mol % to about 55 mol %, and Al2O3 in a range between about 0 mol % to about 10 mol %. The ceramic coating may alternatively include Y2O3 in a range between about 30 mol % to about 60 mol %, ZrO2 in a range between about 0 mol % to about 20 mol %, and Al2O3 in a range between about 30 mol % to about 60 mol %. |
| 申请公布号 |
US2014363596(A1) |
申请公布日期 |
2014.12.11 |
| 申请号 |
US201313954808 |
申请日期 |
2013.07.30 |
| 申请人 |
Applied Materials, Inc. |
发明人 |
Sun Jennifer Y.;Kanungo Biraja P.;Cho Tom |
| 分类号 |
C23C16/44 |
主分类号 |
C23C16/44 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of manufacturing an article comprising;
providing a body; and coating at least one surface of the body with a ceramic coating comprising Y2O3 in a range between about 45 mol % to about 99 mol %, ZrO2 in a range from about 0 mol % to about 55 mol %, and Al2O3 in a range from about 0 mol % to about 10 mol %. |
| 地址 |
Santa Clara CA US |
