发明名称 |
VOLATILE BASIC NITROGEN GAS SENSORS USING MOLYBDENUM OXIDE AND FABRICATION METHOD THEREOF |
摘要 |
<p>A gas sensor capable of selectively sensing volatile basic nitrogen gas, such as trimethylamine, and a manufacturing method thereof are provided. According to the present invention, the gas sensor has a gas sensing layer formed of molybdenum (MoO_3) powders by a thermal cracking process. According to the present invention, the method for manufacturing the gas sensor is as follows. Molybdenum powders are formed by a thermal cracking process. The molybdenum powders are produced into the thin film structure, and the thin film structure forms a gas sensing layer. The gas sensor has a structure effective in diffusion of gas by easily controlling a fine structure by the thermal cracking method and can remarkably improve selective sensitivity to the trimethylamine gas by remarkably improving sensitivity of gas by blocking secondary particles from being increased.</p> |
申请公布号 |
KR20140141774(A) |
申请公布日期 |
2014.12.11 |
申请号 |
KR20130061903 |
申请日期 |
2013.05.30 |
申请人 |
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION;SENTECH KOREA CO., LTD. |
发明人 |
LEE, JONG HEUN;CHO, YOON HO;KANG, YUN CHAN |
分类号 |
G01N27/407;G01N33/02 |
主分类号 |
G01N27/407 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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