APPARATUS AND METHOD FOR SEPARATING PLATES

摘要

Provided are a substrate separating apparatus and a substrate separating method. The substrate separating apparatus includes: a top transfer unit which fixes a top substrate and transfers the top substrate in a positive X-axis direction in XY coordinates composed of an X-axis and a Y-axis which vertically cross; and a bottom transfer unit which is separately installed on the lower side of the top transfer unit and fixes and transfers a bottom substrate. The bottom transfer unit includes: a bottom mounting means which receives the bottom substrate on the upper side thereof; and a bottom guide means which includes a route guide to guide the movement of the bottom receiving means. The route guide includes: a first route guide in parallel to the X-axis; and a second route guide which is continuous with the first route guide and is in contact with a line with a negative slope in the coordinates.