ANALYSER ARRANGEMENT FOR PARTICLE SPECTROMETER

摘要

The present invention relates to a method for determining at least one parameter related to charged particles emitted from a particle emitting sample. The method comprises guiding a beam of charged particles into an entrance of a measurement region by means of a lens system, and detecting positions of the particles indicative of said at least one parameter within the measurement region. Furthermore, the method comprises deflecting the particle beam at least twice in the same coordinate direction before entrance of the particle beam into the measurement region. Thereby, both the position and the direction of the particle beam at the entrance of the measurement region can be controlled in a way that to some extent eliminates the need for physical manipulation of the sample. This in turn allows the sample to be efficiently cooled such that the energy resolution in energy measurements can be improved.

主权项

1. A method for determining at least one parameter related to charged particles emitted from a particle emitting sample, comprising the steps of:
forming a particle beam of said charged particles and transporting the particles between said particle emitting sample and an entrance of a measurement region by means of a lens system having a substantially straight optical axis; deflecting the particle beam in at least a first coordinate direction perpendicular to the optical axis of the lens system before entrance of the particle beam into the measurement region, detecting the positions of said charged particles in said measurement region, the positions being indicative of said at least one parameter, and deflecting the particle beam in the same at least first coordinate direction at least a second time before entrance of the particle beam into the measurement region.