发明名称 DEPOSITION APPARATUS, METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE SAME, AND ORGANIC LIGHT EMITTING DISPLAY APPARATUS MANUFACTURED BY THE METHOD
摘要 <p>The present invention relates to a deposition apparatus, a method for manufacturing an organic light emitting display device using the deposition apparatus, and the organic light emitting display device manufactured thereby. The present invention can be suitably used for mass production of large-sized substrate and implement high-definition patterning. The present invention can also minimize the number of pattern layers to simplify the manufacturing process of the organic light emitting display device.</p>
申请公布号 KR20140142087(A) 申请公布日期 2014.12.11
申请号 KR20130063692 申请日期 2013.06.03
申请人 SAMSUNG DISPLAY CO., LTD. 发明人 SONG, JUNG BAE
分类号 H01L51/56;C23C14/24;H05B33/10 主分类号 H01L51/56
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