发明名称 半導体装置の作製方法
摘要 A wiring substrate is provided, including an insulating resin layer which is provided on both surfaces of a sheet-like fibrous body and with which the sheet-like fibrous body is impregnated, and a through wiring provided in a region surrounded by the insulating resin layer. The through wiring is formed using a conductive material, the conductive material is exposed on both surfaces of the insulating resin layer, the sheet-like fibrous body is positioned in the conductive material, and the sheet-like fibrous body is impregnated with the conductive material. A manufacturing method of the wiring substrate is also provided.
申请公布号 JP5639749(B2) 申请公布日期 2014.12.10
申请号 JP20090134374 申请日期 2009.06.03
申请人 株式会社半導体エネルギー研究所 发明人 千田 章裕;青木 智幸
分类号 H05K1/11;H01L21/288;H01L21/3205;H01L21/336;H01L21/60;H01L21/768;H01L21/8247;H01L23/522;H01L27/115;H01L29/786;H01L29/788;H01L29/792;H05K1/03;H05K3/40 主分类号 H05K1/11
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