SUBSTRATE HOLDER AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
摘要
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
申请公布号
EP2810127(A1)
申请公布日期
2014.12.10
申请号
EP20130700401
申请日期
2013.01.17
申请人
ASML NETHERLANDS B.V.
发明人
LAFARRE, RAYMOND;DONDERS, SJOERD;TEN KATE, NICOLAAS;DZIOMKINA, NINA;KARADE, YOGESH;RODENBURG, ELISABETH