| 发明名称 |
INTEGRATED VAPOR TRANSPORT DEPOSITION METHOD AND SYSTEM |
| 摘要 |
<p>vapor transport deposition system and method that includes a vaporizer and distributor unit and at least one auxiliary process unit for integrating thin-film layer deposition with one or more pre- or post-deposition processes.</p> |
| 申请公布号 |
EP2809822(A1) |
申请公布日期 |
2014.12.10 |
| 申请号 |
EP20130702873 |
申请日期 |
2013.01.29 |
| 申请人 |
FIRST SOLAR, INC |
发明人 |
XIONG, GANG;BARDEN, JOHN;POWELL, RICK, C.;JIN, CHANGMING;LIAO, FENG |
| 分类号 |
C23C14/02;C23C14/06;C23C14/22;C23C14/58;H01L21/365;H01L31/032 |
主分类号 |
C23C14/02 |
| 代理机构 |
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代理人 |
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