| 摘要 |
<p>A gas removal system for a clean room of the present invention, which is installed at a path through which air including a gas of a clean room flows in and discharged, includes: a prefilter to filter a foreign matter included in the air; an air washer to spray water to the air passing through the prefilter to remove the gas included in the air; a cooling coil to decrease a humidity of the air, which passed through the air washer and having an increased humidity; a heating coil to increase a temperature of the air, which passed through the cooling coil and having a decreased temperature; and a fan to suck and discharge the air of the clean room, wherein a thermal exchange between an outlet air, which passed through the cooling coil, and an inlet air having a relatively higher temperature than the outlet air is performed. Therefore, the gas included in the air inside the clean room is removed by the air washer.</p> |
