| 摘要 |
<p>Disclosed is a composite thin film. According to a preferred embodiment of the present invention, provided is a composite thin film formed of 15-30 at.% of aluminum, 15-30 at.% of titanium, 3-10 at.% of silicon, and 30-50 at.% of nitrogen. According to the present invention, a composite thin film having super stiffness equal to or greater than 40 GPa can be formed such that the super-stiff thin film is used for treating, such as coating a metallic surface; thereby enabling the surface-treated metal to have excellent material properties such as high-temperature strength, softening resistance, and toughness.</p> |
