THE FABRICATION METHOD OF THIN FILM DEPOSITION DEVICE AND THE FABRICATION METHOD OF ORGANIC LIGHT EMITTING DISPLAY DEVICE USING THE SAME

摘要

Disclosed are a method for manufacturing a thin film deposition device and a method for manufacturing an organic light-emitting display device by using the same. According to the present invention, the method for manufacturing the thin film deposition device comprises the following steps: processing a chamber so as to prevent contamination of a plurality of tab holes formed in the chamber by using a coupling part; electropolishing the chamber; and cleaning the chamber so as to remove contamination from the tab holes of the chamber by using a cleaning solution.