发明名称 弾性境界波装置の製造方法および弾性境界波装置
摘要 A manufacturing method for a boundary acoustic wave device is capable of certainly providing the boundary acoustic wave device with desired target frequency characteristics. The manufacturing method for the boundary acoustic wave device includes a process for preparing a laminated body that includes a first medium, a second medium laminated on the first medium, and an IDT electrode that is disposed at an interface between the first and second media, and a process for implanting ions from an outer portion of the second medium and adjusting a frequency.
申请公布号 JP5637068(B2) 申请公布日期 2014.12.10
申请号 JP20110116117 申请日期 2011.05.24
申请人 株式会社村田製作所 发明人 神藤 始;佐治 真理
分类号 H03H3/10;H03H9/145 主分类号 H03H3/10
代理机构 代理人
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