发明名称 METHODS OF FORMING LAYERS
摘要 <p>A method of forming a layer, the method including providing a substrate having at least one surface adapted for deposition thereon; and directing a particle beam towards the surface of the substrate, the particle beam including moderately charged ions (MCIs), substantially all the MCIs independently have charges from ±2 to ±6 and kinetic energies of not greater than about 200 eV, wherein the MCIs do not penetrate more than about 30 Å into the surface of the substrate to form a layer on the substrate.</p>
申请公布号 EP2810298(A1) 申请公布日期 2014.12.10
申请号 EP20130707475 申请日期 2013.02.01
申请人 SEAGATE TECHNOLOGY LLC;PITCHER, PHILIP, GEORGE 发明人 PITCHER, PHILIP, GEORGE
分类号 H01L21/02;H01L21/265 主分类号 H01L21/02
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